The MiCS-6814 is a compact MOS sensor with three fully independent sensing elements on one package. It is a robust MEMS sensor for the detection of pollution from automobile exhausts and for agricultural/industrial odors.
The silicon gas sensor structure consists of an accurately micro machined diaphragm with an embedded heating resistor and the sensing layer on top.
The MiCS-6814 includes three sensor chips with independent heaters and sensitive layers. One sensor chip detects oxidising gases (OX) , the other sensor detects reducing gases (RED) and the other detects NH3. The internal connections are shown above.