Description:
The MiCS-6814 is a compact MOS sensor with three fully independent sensing elements on one package. It is a robust MEMS sensor for the detection of pollution from automobile exhausts and for agricultural/industrial odors.
Sensor configuration
The silicon gas sensor structure consists of an accurately micro machined diaphragm with an embedded heating resistor and the sensing layer on top.
The MiCS-6814 includes three sensor chips with independent heaters and sensitive layers. One sensor chip detects oxidising gases (OX) , the other sensor detects reducing gases (RED) and the other detects NH3. The internal connections are shown above.
Detectable gases:
- Carbon monoxide (CO) 1 - 1000ppm
- Nitrogen dioxide (NO2) 0.05 - 10ppm
- Ethanol (C2H5OH) 10 - 500ppm
- Hydrogen (H2) 1 - 1000ppm
- Ammonia (NH3) 1 - 500ppm
- Methane (CH4) >1000ppm
- Propane (C3H8) >1000ppm
- Iso-butane (C4H10) >1000ppm
Specifications
