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The MiCS-6814 is a compact MOS sensor with three fully independent sensing elements on one package. It is a robust MEMS sensor for the detection of pollution from automobile exhausts and for agricultural/industrial odors.
Sensor configuration
The silicon gas sensor structure consists of an accurately micro machined diaphragm with an embedded heating resistor and the sensing layer on top.
The MiCS-6814 includes three sensor chips with independent heaters and sensitive layers. One sensor chip detects oxidising gases (OX) , the other sensor detects reducing gases (RED) and the other detects NH3. The internal connections are shown above.


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The MiCS-6814 is a compact MOS sensor with three fully independent sensing elements on one package. It is a robust MEMS sensor for the detection of pollution from automobile exhausts and for agricultural/industrial odors.
Sensor configuration
The silicon gas sensor structure consists of an accurately micro machined diaphragm with an embedded heating resistor and the sensing layer on top.
The MiCS-6814 includes three sensor chips with independent heaters and sensitive layers. One sensor chip detects oxidising gases (OX) , the other sensor detects reducing gases (RED) and the other detects NH3. The internal connections are shown above.


No reviews yet. Be the first to share your experience!
Discover More In:
Category: View all Sensor
Fill out the form below and our team will get back to you with bulk pricing.
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